High efficiency, high uniformity, grating coupled surface emitting lasers

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Abstract
Grating coupled surface emitting lasers are fabricated with supeiiattice reflectors on the substrate side to increase the output coupling from the second order grating. Differential efficiencies of 60% are achieved with high uniformity over the wafer surface. Spectral uniformity across a 1 cm wafer is better than 0.4 nm while the far field radiation angle from the individual gratings are within 0.02° of the normal. The high uniformity and good lasing characteristics are critical to the coherent coupling of an array of surface emitting devices.

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