Computer Control and Data Management in an LSI Fabrication Facility

• 1 September 1980
• journal article
• Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Components, Hybrids, and Manufacturing Technology
• Vol. 3  (3) , 339-344
• https://doi.org/10.1109/tchmt.1980.1135636

Abstract

Keywords

• INSPECTION
• RESISTIVITY MEASUREMENTS
• FURNACES
• WAFER LOT
• FABRICATED
• MANAGEMENT
• SCHEDULING
• PROCESSING STEP
• DIFFUSION