Computer simulation of anisotropic crystal etching
- 1 September 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 34 (3) , 225-241
- https://doi.org/10.1016/0924-4247(92)85006-n
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- Fabrication of novel three-dimensional microstructures by the anisotropic etching ofIEEE Transactions on Electron Devices, 1978
- Anisotropic etching of siliconIEEE Transactions on Electron Devices, 1978
- Prediction of ion-bombarded surface topographies using Frank's kinematic theory of crystal dissolutionJournal of Materials Science, 1973