A novel thin film interferometer
- 1 March 1990
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 61 (3) , 980-983
- https://doi.org/10.1063/1.1141203
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Silicon nitride single-layer x-ray maskJournal of Vacuum Science and Technology, 1982