A planar XY robotic fine positioning device
- 23 March 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 329-336
- https://doi.org/10.1109/robot.1985.1087330
Abstract
We describe in this paper a small, fast, precise positioner which can be attached to the terminal link of a general purpose robot for assembly and inspection tasks. The device is a very compact combination of two-dimensional linear motor, flexure springs, position sensor and digital controller. Peak velocities and accelerations of 24.8 cm/sec and 8.7 g are achieved. Positioning resolution is 0.5 μm using the built-in sensor, and compliance can be varied dynamically by the digital controller loop gain. Design considerations, discussion of the major elements of the device, and performance measurements are presented.Keywords
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