Atomic layer epitaxy growth of titanium dioxide thin films from titanium ethoxide

• 1 April 1994
• journal article
• Published by American Chemical Society (ACS) in Chemistry of Materials
• Vol. 6  (4) , 556-561
• https://doi.org/10.1021/cm00040a035

Abstract

Keywords

• ATOMIC LAYER EPITAXY
• THIN FILM
• TITANIUM