Chromium Oxide Thin Films Prepared by Chemical Vapor Deposition from Chromium Acetylacetonate and Chromium Hexacarbonyl

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Abstract
Chromium oxide thin films were prepared by atmospheric‐pressure chemical vapor deposition (CVD) methods. For CVD from chromium hexacarbonyl, the lower limit of the reaction temperature was 150°C, which could be reduced to 60°C by irradiation with UV light. The films exhibited preferred overgrowth with a vertically developed three‐dimensional coarse structure. On the other hand, shiny smooth films were prepared by CVD from chromium acetylacetonate at a reaction temperature above 400°C. These films showed a significant solar absorptance coupled with a high infrared reflectance, which is necessary for efficient conversion of solar energy into heat.

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