Effects of oxygen on the growth of vapor-deposited aluminium films

• 1 November 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (6) , 3101-3105
• https://doi.org/10.1116/1.573636

Abstract

Keywords

• EFFECTS OF OXYGEN
• ALUMINIUM FILMS
• DEPOSITED ALUMINIUM
• GROWTH
• VAPOR DEPOSITED