Magnetic Properties of Nanocrystalline bcc Fe-M-B (M=Ta, Hf, Ti, Nb, Zr) Sputtered Films

Publisher Website
Google Scholar
Abstract
The structure and magnetic properties of Fe-M-B (M=Ta, Hf, Ti, Nb, Zr) alloy films produced by rf sputtering were investigated. A mostly single bcc phase with a nanoscale grain size of about 10 nm was found to be formed by annealing these sputtered amorphous films. The good soft magnetic properties seem to result from the decrease in the apparent magnetic anisotropy caused by the formation of a nanocrystalline bcc structure and by the reduction in the magnetostriction due to dissolution of M and B into the bcc phase. The Fe content of the composition to obtain an excellent soft magnetic property in the alloy film with a large atomic radius of M element rises and the value of Bs obtained as a result grows. A high permeability (μ) of 1350 to 3460 at 1 MHz combined with a high saturation magnetization (Bs) of 1.42 to 1.64 T was obtained for Fe76.8Ta6.6B16.6, Fe87.9Hf9.8B2.3, Fe78.5Nb8.3B13.2, and Fe89.6Zr7.7B2.7 by annealing the amorphous films for 3.6 ks at 873 K or 923 K.

This publication has 0 references indexed in Scilit: