An ion scattering spectroscopy and temperature-programed desorption study of the interaction of N2 with Si(111)

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Abstract
Ion scattering spectroscopy (ISS) and temperature-programed desorption (TPD) were used to study the interaction between N2 and a Si(111)(7×7) surface at room temperature. No adsorbed nitrogen is detected using Auger electron spectroscopy for doses as high as 3000 L. However, ISS easily detects adsorbed nitrogen following doses as low as 2 L and indicates that a saturation dose is approximately 75 L. Using TPD, evidence of at least two chemisorbed states of nitrogen is found. Hydrogen, which originates from the bulk of the sample, is found to associate with the surface nitrogen. Low-energy electron diffraction was used to monitor surface structure throughout N2 adsorption and during subsequent heating, but no features due to the (8×8) nor the quadruplet pattern observed in previous studies were observed under the exposure conditions used in this study.

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