1.17 Turbomolecular pumps with corrosion-resistant oil for the lubrication and cooling of the rotor bearings
- 31 December 1977
- Vol. 27 (3) , 171-173
- https://doi.org/10.1016/0042-207x(77)90051-3
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A Simple Pumping Combination to Reduce Organic Contamination in an Electron MicroscopeJapanese Journal of Applied Physics, 1973
- Reduction of polymer growth in electron microscopes by use of a fluorocarbon oxide pump fluidJournal of Microscopy, 1972
- The use of perfluoropolyether fluids in vapour stream pumpsVacuum, 1972