Theoretical analysis of the static deflection of plates for atomic force microscope applications
- 1 July 1993
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 74 (1) , 1-9
- https://doi.org/10.1063/1.354137
Abstract
The analysis of the static deflection of cantilever plates is of fundamental importance in application to the atomic force microscope (AFM). In this paper we present a detailed theoretical study of the deflection of such cantilevers. This shall incorporate the presentation of approximate analytical methods applicable in the analysis of arbitrary cantilevers, and a discussion of their limitations and accuracies. Furthermore, we present results of a detailed finite element analysis for a current AFM cantilever, which will be of value to the users of the AFM.This publication has 2 references indexed in Scilit:
- Microfabrication of cantilever styli for the atomic force microscopeJournal of Vacuum Science & Technology A, 1990
- Deflections and Moments Due to a Concentrated Load on a Cantilever Plate of Infinite LengthJournal of Applied Mechanics, 1950