Characterization of Plasma-Deposited Amorphous Carbon Films
- 1 January 1987
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Hydrogen recycling properties of graphiteJournal of Nuclear Materials, 1987
- Silicon elastic recoil detection studies of polymer diffusion: Advantages and disadvantagesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Amorphous carbonAdvances in Physics, 1986
- Chemical vapour deposition of diamond in RF glow dischargeJournal of Materials Science Letters, 1985
- Modeling studies of amorphous carbonPhysical Review B, 1984
- Concepts of Backscattering SpectrometryPublished by Elsevier ,1978