Effect of noble gases on the properties of ion beam sputtered niobium films
- 1 January 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 7 (1) , 102-104
- https://doi.org/10.1116/1.575753
Abstract
We present result to support our hypothesis that the reflection of the primary beam during ion−beam sputtering of niobium films plays a significant role in determining final film properties, especially in the case of ion−beam sputtering. The film properties are afected by both the noble gas incorporation in and noble−gas bombardment of the growing film. (AIP)Keywords
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