Soft X-ray contact microscopy
- 1 May 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 246 (1-3) , 668-674
- https://doi.org/10.1016/0168-9002(86)90171-3
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Soft X-ray contact microscopy with nanosecond exposure timesJournal of Microscopy, 1985
- Direct Imaging of Live Human Platelets by Flash X-Ray MicroscopyScience, 1985
- X-ray lithography using a pulsed plasma sourceJournal of Vacuum Science and Technology, 1981
- Simulation of x‐ray resist line edge profilesJournal of Vacuum Science and Technology, 1978