Particulate temperature in radio frequency glow discharges
- 1 July 1993
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 11 (4) , 1126-1131
- https://doi.org/10.1116/1.578452
Abstract
A spectroscopic technique is described for measuring the temperature of phosphorescent particles suspended in a low pressurerfplasma. The particles are found to be slightly hotter than the neutral gas temperature. This result is consistent with models of particle heating in a low pressuredischarge. Also, we report on an entrainment device for introducing the phosphorescent particles (or other types of particles) into a discharge.Keywords
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