Pressure Dependence of the Mean Electron Energy in the Bulk Plasma of an RF Discharge in Argon
- 1 January 1992
- journal article
- research article
- Published by Wiley in Contributions to Plasma Physics
- Vol. 32 (6) , 613-622
- https://doi.org/10.1002/ctpp.2150320604
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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