Fabrication of encapsulated silicon-vacuum field-emission transistors and diodes

• 1 November 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 10  (6) , 2984-2988
• https://doi.org/10.1116/1.585957

Abstract

Keywords

• EMISSION TRANSISTORS
• SILICON VACUUM
• VACUUM FIELD
• ENCAPSULATED SILICON
• DIODES
• FABRICATION