Effects of the ion–solid interaction in glow discharge vapour deposition polymerization of pyromellitic dianhydride
- 2 May 2000
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 166-167, 737-742
- https://doi.org/10.1016/s0168-583x(99)01063-0
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Polyimide films by glow discharge vapor deposition polymerizationMaterials Letters, 1998
- Energy deposition mechanisms and radiation induced reactions in PMDA-ODA polyimideNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992
- Some features of power balance in normal glow discharge in CO2, N2, and their mixtures with HeJournal of Applied Physics, 1991
- Residual gas and ion-beam analysis of ion-irradiated polymersNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980
- Calculation of Ion Bombarding Energy and Its Distribution in rf SputteringPhysical Review B, 1968