Time-resolved x-ray monitoring of laser ablation of and plasma formation from Si
- 15 November 1986
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 60 (10) , 3438-3443
- https://doi.org/10.1063/1.337593
Abstract
We present x‐ray absorption measurements on silicon clusters and silicon plasmas produced by pulsed laser irradiation of bulk silicon. The results are compared with earlier time‐resolved x‐ray absorption measurements on amorphous silicon foils under pulsed laser irradiation. Clusters are formed at an irradiance as low as 3.0 J/cm2. At an irradiance of 14 J/cm2 ionized species up to Si4+ are formed. We find a removed Si layer thickness of 80 Å at an irradiance of ≊6 J/cm2, at 15 ns pulse duration.This publication has 11 references indexed in Scilit:
- A time-resolved x-ray absorption study of amorphous Si during pulsed laser irradiationJournal of Applied Physics, 1986
- Laser-generated plasma as soft x-ray sourceJournal of Applied Physics, 1986
- Calculation of Magic Numbers and the Stability of Small Si ClustersPhysical Review Letters, 1986
- Pulsed-laser irradiated silicon studied by time-resolved x-ray absorption (90–300 eV)Physical Review Letters, 1986
- Negative and positive cluster ions of carbon and siliconChemical Physics Letters, 1985
- A polychromator for (S)EXAFS using a laser generated plasma as soft X-ray sourceNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1985
- Laser-induced plasmas for primary ion deposition of epitaxial Ge and Si filmsJournal of Vacuum Science & Technology B, 1985
- Photofragmentation of Mass-ResolvedClustersPhysical Review Letters, 1985
- Time-resolved x-ray diffraction measurement of the temperature and temperature gradients in silicon during pulsed laser annealingApplied Physics Letters, 1983
- Phase transformation on and charged particle emission from a silicon crystal surface, induced by picosecond laser pulsesApplied Physics Letters, 1981