Growth kinetics of silicon carbide CVD
- 1 September 1988
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 91 (4) , 599-604
- https://doi.org/10.1016/0022-0248(88)90127-3
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Growth rates of vapor grown filamentsJournal of Crystal Growth, 1984
- Production of large-area single-crystal wafers of cubic SiC for semiconductor devicesApplied Physics Letters, 1983
- SiC coatings for first-wall candidate materials by R.F. sputteringThin Solid Films, 1979
- Growth of SiC whiskers in the system SiO2-C-H2nucleated by ironJournal of Crystal Growth, 1971