Outgassing properties of Ti-N thin films. (III).

• 1 January 1991
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 34  (3) , 286-288
• https://doi.org/10.3131/jvsj.34.286

Abstract

Keywords

• THIN FILMS
• OUTGASSING PROPERTIES
• III
• TI N THIN
• PROPERTIES OF TI