Abstract
Metalorganic molecular‐beam epitaxy (MOMBE) is a hybrid growth technique which combines the gaseous sources of metalorganic chemical vapor deposition with the ultrahigh vacuum growth environment of molecular‐beam epitaxy. This combination greatly alters the growth chemistry relative to that obtained in the parent techniques and hence often mandates the development and use of novel matrix and dopant sources. This paper will discuss how the unique chemistry of MOMBE may be exploited for growth of various III–V materials, paying particular attention to the effect of source chemistry on impurity uptake, dopant control, and uniformity. It will also review variations of the basic MOMBE process, such as electron cyclotron resonance‐MOMBE, which allow for growth of nitrogen based materials. Finally the future of this growth technique will be assessed and the key issues which must be resolved in order for this method to achieve its full potential will be discussed.