Plasma polymerization. II. An ESCA investigation of polymers synthesized by excitation of inductively coupled RF plasma in perfluorobenzene and perfluorocyclohexane

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Abstract
The plasma polymers formed in glow and nonglow regions of an inductively coupled RF plasma with perfluorobenzene and perfluorocyclohexane are discussed as a function of operating conditions of the plasma by means of ESCA. The core levels of the plasma polymers are shown to be strikingly different but characteristic of a well‐defined but complex polymerization scheme. For the nonglow regions fluorine incorporation is shown to be greater than for polymers prepared in the glow regions and a preponderance of CF2 features is apparent. Perfluorobenzene deposits polymer faster than perfluorocyclohexane and changes in component composition of the C1s profile are studied as a function of operating conditions of the gas plasma.

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