Fourier transform infrared spectroscopic study of predeposition reactions in metalloorganic chemical vapor deposition of gallium nitride. 2
- 1 November 1991
- journal article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 3 (6) , 1093-1097
- https://doi.org/10.1021/cm00018a027
Abstract
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