A silicon-based tactile sensor for finger-mounted applications
- 1 January 1998
- journal article
- clinical trial
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Biomedical Engineering
- Vol. 45 (2) , 151-159
- https://doi.org/10.1109/10.661263
Abstract
Presents a silicon-based force sensor packaged in a flexible package and describes the sensors performance on human subjects. The sensing element consists of a circular silicon diaphragm (200-/spl mu/m thick with a 2-mm radius) over a 10-/spl mu/m sealed cavity with a solid Torlon dome providing force-to-pressure transduction to the diaphragm. Two dome heights (0.5 and 1.5 mm) were compared. The sensor with the taller dome showed improved sensitivity. Dynamic calibration and tracking experiments are performed with the sensor mounted on the dominant thumb of 5 human subjects. Both force and loading direction are statistically significant (P<0.05). Subject variability accounted for 8.7% of the variance, while loading direction accounted for 1.9% of the variance. Average errors for the tracking experiment range from -2.8 to 1.0 N and are subject dependent. Three out of 4 subjects showed increasing negative error with increasing load.Keywords
This publication has 24 references indexed in Scilit:
- Robotic tactile sensor array fabricated from a piezoelectric polyvinylidene fluoride filmPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- An artificial tactile sensor for fine-form discriminationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A linear force-summing hand dynamometer independent of point of applicationApplied Ergonomics, 1991
- Measurement of properties and function of skinClinical Physics and Physiological Measurement, 1991
- Electrotactile and vibrotactile displays for sensory substitution systemsIEEE Transactions on Biomedical Engineering, 1991
- Dynamic measurement of the viscoelastic properties of skinJournal of Biomechanics, 1991
- The Use of Force Sensing Resistors in Ergonomic Tool DesignProceedings of the Human Factors Society Annual Meeting, 1989
- Tactile sensory monitoring of clinician-applied forces during delivery of newbornsIEEE Transactions on Biomedical Engineering, 1988
- Flexible circuit and sensor arrays fabricated by monolithic silicon technologyIEEE Transactions on Electron Devices, 1985
- Dynamic mechanical testing of human skin ‘in vivo’Journal of Biomechanics, 1970