Correlation of fabrication process and electrical device parameter variations
- 1 August 1977
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Solid-State Circuits
- Vol. 12 (4) , 349-355
- https://doi.org/10.1109/jssc.1977.1050913
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Boron Diffusion Coefficient Increased by Phosphorus DiffusionJournal of the Electrochemical Society, 1974