Dynamic control and modal analysis of coupled nano-mechanical resonators

We present measurements on nanomechanical resonators allowing full in situ tuning of their dynamic properties, including higher-order nonlinearities (up to fifth order) and the mechanical quality factor $\mathrm{Q.}$ This is accomplished by gating electrodes and balancing resonators, similarily to a classical tuning fork. A detailed modal analysis is performed and reproducibility of the device response is verified. Eigenfrequencies are in the range of 40 to 70 MHz, and quality factor rises up to ${\text{Q∼6×10}}^3.$