A novel position-sensitive detector using an image-sensing integrated circuit

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Abstract
A novel position‐sensitive detector has been developed which consists of an array of electron‐sensing electrodes and a corresponding array of amplifiers and counters all integrated onto a single silicon chip. The integrated circuit is coupled with a microchannel plate electron multiplier so that it counts individual charged particles or photons. The detector array is capable of being extended by abutting individual detector chips side by side in the form of a hybrid circuit. The detector is currently in use on both electron‐energy‐loss and photoelectron spectrometers.