Physical Characterization of Thin Films of Lithium Niobate Deposited on Silicon Substrates
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Magnetron sputtered lithium niobate filmsVacuum, 1984
- R.F. Sputtering of LiNbO3 thin filmsThin Solid Films, 1982
- Optical waveguiding properties of sputtered LiNbO3 single crystalthin films on LiTaO3 substratesFerroelectrics, 1976
- Optical waveguides of single-crystal LiNbO3 film deposited by rf sputteringApplied Physics Letters, 1974