A gas mixing device for MOCVD
- 1 August 1987
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 84 (2) , 191-195
- https://doi.org/10.1016/0022-0248(87)90129-1
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- An ultra-fast gas delivery system for producing abrupt compositional switching in OMVPEJournal of Crystal Growth, 1986
- Novel reactor design for large area uniformity of abrupt heterojunction structuresJournal of Crystal Growth, 1986
- A bird's-eye view on the evolution of semiconductor superlattices and quantum wellsIEEE Journal of Quantum Electronics, 1986