Deposition of ZrO2 and Y2O3-stabilized ZrO2 from β-diketonates

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Abstract
The deposition of ZrO2 and Y2O3-stabilized ZrO2 from metalorganic β-diketonates by CVD and the evaporation behaviour of those precursors was investigated. Evaporation and deposition processes were correlated with fluiddynamical calculations and found to be in good agreement. The calculations also show that much higher growth rates than achieved until now could be expected (i.e. >1 μm/min)

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