Metal-Catalyzed Vinyl Addition Polymers for 157 nm Resist Applications. 2. Fluorinated Norbornenes: Synthesis, Polymerization, and Initial Imaging Results
- 11 July 2002
- journal article
- research article
- Published by American Chemical Society (ACS) in Macromolecules
- Vol. 35 (17) , 6539-6549
- https://doi.org/10.1021/ma0122371
Abstract
No abstract availableKeywords
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