Investigation of the Sensitivity of Ionization-Type Vacuum Gauges

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Abstract
A quantitative analysis of a large and representative sample of available data has been made to determine the best criteria for predicting the relative sensitivities of ionization-type vacuum gauges to different gases. The molecular property of the gas that correlates best with relative sensitivity is the ionization cross section σ (eV). The best σ value to choose according to gauge type is as follows: 1. For high-pressure ionization gauges, a σ evaluated at 23 of the accelerating potential of the gauge is the best choice. 2. For Bayard-Alpert and triode gauges, any of three choices are of approximately equal value. These are 100 eV σ values, maximum σ value for each gas, and a σ evaluated at 23 of the accelerating potential for each gauge. 3. For the Alphatron gauge, σ values in the range 5000–10 000 eV provide the best correlation. 4. For cold cathode ionization gauges, insufficient data were available to come to any conclusions.

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