Performance of an Atom Probe Field Ion Microscope

• 1 January 1974
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 17  (7) , 228-234
• https://doi.org/10.3131/jvsj.17.228

Abstract

Keywords

• FIELD ION
• ION MICROSCOPE
• ATOM PROBE
• PROBE FIELD
• PERFORMANCE