Resuscitation of carbon-contaminated mirrors and gratings by oxygen-discharge cleaning 2: Efficiency recovery in the 100–1000-eV range
- 15 October 1988
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 27 (20) , 4305-4313
- https://doi.org/10.1364/ao.27.004305
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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