Surface differential reflectivity spectroscopy of semiconductor surfaces

• 1 May 1987
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 5  (3) , 327-332
• https://doi.org/10.1116/1.574154

Abstract

Keywords

• DIFFERENTIAL REFLECTIVITY
• SURFACE DIFFERENTIAL
• SEMICONDUCTOR SURFACES
• CONSIDERATIONS CONCERNING
• EXPERIMENTAL APPARATUS
• REFLECTIVITY SPECTROSCOPY
• SDR DATA
• THEORETICAL CONSIDERATIONS