Structural investigation of silicon films chemically vapour deposited onto amorphous SiO2 substrates
- 1 February 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 56 (3) , 267-277
- https://doi.org/10.1016/0040-6090(79)90128-7
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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