The construction of small planar magnetrons for sputtering use

• 1 January 1981
• journal article
• Published by Elsevier in Vacuum
• Vol. 31  (1) , 5-7
• https://doi.org/10.1016/s0042-207x(81)80089-9

Abstract

Keywords

• MAGNETRONS FOR SPUTTERING
• PLANAR MAGNETRONS
• SMALL PLANAR
• SPUTTERING USE
• CONSTRUCTION