Nondestructive depth profile study of oxygen-exposed large-grain silver using angle-resolved Auger electron spectroscopy and ion scattering spectroscopy

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Abstract
The adsorption of oxygen on polycrystalline Ag during exposure to 75 Torr of O2 for 1 h at temperatures ranging from 75 to 250 °C has been examined using ion scattering spectroscopy (ISS) and angle-resolved Auger electron spectroscopy (ARAES). Quantification of these data provide the profile of the O concentration in the near-surface region of the Ag as a function of exposure temperature. The O concentration in the outermost atomic layer increases from 0% according to forward-scattered ISS for the cleaned surface to a maximum value of about 50 at. % for the 250 °C exposure. A very small amount of subsurface O remains on the cleaned Ag surface after prolonged ion sputtering and annealing treatments. The total amount of subsurface O also increases monotonically with dosing temperature and reaches a uniform concentration level of 14 at. % over the region probed by Auger electron spectroscopy (AES). Exposures at higher temperatures (up to 600 °C) results in the same near-surface O concentration profile as the 250 °C exposure.

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