Abstract
Geometry factors of cavity resonators for the determination of plasma electron density, density profile, and collision frequency Geometry factors of a number of cylindrical TEimn and TMimn cavity resonance modes are cal-culated as a function of the ratio of plasma and cavity radius and as a function of the radial electron density profile. In axial direction homogeneous and sinusoidal density profiles are assumed. Resonance modes with a small index l are suitable for the measurement of electron densities in narrow and dilute plasma columns; modes with an index l ≧ 2 are specially advantageous for measuring the density profile. Results of measurements of the electron density, density profile, and collision frequency in nitrogen are given.

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