Interpretation of Destructive Breakdown in Thin Dielectric Films

• 1 July 1969
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 6  (4) , 602-604
• https://doi.org/10.1116/1.1315699

Abstract

Keywords

• DESTRUCTIVE BREAKDOWN
• BREAKDOWN IN THIN
• THIN DIELECTRIC FILMS