Calibration of the electrical response of piezoelectric elements at low voltage using laser interferometry
- 19 June 1989
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 54 (25) , 2530-2531
- https://doi.org/10.1063/1.101064
Abstract
A laser interferometric method is described by which the length-to-voltage sensitivity of piezoelectric elements, as used e.g., in scanning tunneling microscopes, can be calibrated. The method is based on measuring the optical frequency of a laser locked to a piezoelectrically tuned interferometer, relative to a stable reference. The high sensitivity of this technique allows the calibration to be carried out in the low-voltage regime.Keywords
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