Aqueous photolithographic etching of TGS
- 1 November 1983
- journal article
- Published by Taylor & Francis in Ferroelectrics
- Vol. 49 (1) , 317-322
- https://doi.org/10.1080/00150198308244705
Abstract
The solubility and the etching rate (b-face) of TGS crystal in acetone- and ethyl alcohol-water solutions were studied. With the etching knowledge and the photolithographic technique, it is feasible to make TGS pyroelectric detectors of select-etched structure, which is advantageous in processing handling and tooling, together with high detector sensitivity resulting from controllable thinner thickness and better thermal insulation of active area.Keywords
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