A latching accelerometer fabricated by the anisotropic etching of (110) oriented silicon wafers
- 1 March 1992
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 2 (1) , 10-13
- https://doi.org/10.1088/0960-1317/2/1/003
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Vertical Etching of Silicon at very High Aspect RatiosAnnual Review of Materials Science, 1979