An Efficient Two-Photon-Generated Photoacid Applied to Positive-Tone 3D Microfabrication
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- 10 May 2002
- journal article
- other
- Published by American Association for the Advancement of Science (AAAS) in Science
- Vol. 296 (5570) , 1106-1109
- https://doi.org/10.1126/science.296.5570.1106
Abstract
A two-photon–activatable photoacid generator, based on a bis [(diarylamino) styryl]benzene core with covalently attached sulfonium moieties, has been synthesized. The photoacid generator has both a large two-photon absorption cross section (δ = 690 × 10 −50 centimeter 4 second per photon) and a high quantum yield for the photochemical generation of acid (φ H + = 0.5). Under near-infrared laser irradiation, the molecule produces acid after two-photon excitation and initiates the polymerization of epoxides at an incident intensity that is one to two orders of magnitude lower than that needed for conventional ultraviolet-sensitive initiators. This photoacid generator was used in conjunction with a positive-tone chemically amplified resist for the fabrication of a three-dimensional (3D) microchannel structure.Keywords
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