Molecular-scale growth of silicon oxide on polymer substrate through vacuum ultraviolet light-assisted photooxidation of organosilane precursor
- 1 August 2003
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 437 (1-2) , 89-94
- https://doi.org/10.1016/s0040-6090(03)00662-x
Abstract
No abstract availableKeywords
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