Positive Particle Beam Deposition of Some Metallic Films

• 1 September 1977
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 16  (9) , 1547-1556
• https://doi.org/10.1143/jjap.16.1547

Abstract

Keywords

• EXPONENTIAL FUNCTION
• ELECTRON BEAM
• POTENTIAL DIFFERENCE