Soft X-Ray Image Sensor Using Hydrogenated Amorphous Silicon
- 1 February 1985
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 24 (2A) , L129-130
- https://doi.org/10.1143/jjap.24.l129
Abstract
The effective absorption coefficient of a-Si:H was measured as 100 to 300 cm-1 for an X-ray tube voltage of 50 kV to 10 kV. For soft X-ray image sensor, a-Si:H target vidicons with a Be face plate were demonstrated. Resolution of a 1 inch tube was greater than 800 TV lines and sensitivity was 1.13 nA/cm2/mR for an a-Si:H film about 7 µm thick.Keywords
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