Hydrogen release during erd analysis of hydrogen in amorphous carbon films prepared by rf-sputtering
- 1 June 1988
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 33 (1-4) , 792-794
- https://doi.org/10.1016/0168-583x(88)90684-2
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Hydrogen Content in a-SiC:H Films Prepared by Plasma Decomposition of Silane and Methane or EthyleneJapanese Journal of Applied Physics, 1984
- Depth profiling of hydrogen by detection of recoiled protonsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1984
- Technique for profiling 1H with 2.5-MeV Van de Graaff acceleratorsApplied Physics Letters, 1979
- Profiling hydrogen in materials using ion beamsNuclear Instruments and Methods, 1978